GAS-PHASE VERSUS SURFACE CONTRIBUTIONS TO PHOTOLYTIC LASER CHEMICAL VAPOR-DEPOSITION RATES

被引：28

作者：

BRAICHOTTE, D

VANDENBERGH, H

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 45卷 / 04期

关键词：

D O I：

10.1007/BF00617940

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：337 / 343

页数：7

共 12 条

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[3]

Braichotte D., 1986, Proceedings of the International Conference on Lasers '85, P688

[4]

Braichotte D., 1984, SPRINGER SER CHEM PH, V39, P183

[5]

BRAICHOTTE D, 1986, LASER PROCESSING DIA, P95

[6]

BRAICHOTTE D, 1987, P NATO WORKSHOP EMER

[7]

Braichotte D., 1985, SPRINGER SER OPT SCI, V48, P38

[8]

GARRIDO C, IN PRESS

[9] PHOTODEPOSITION RATES OF METAL FROM METAL ALKYLS [J].

KRCHNAVEK, RR ;

GILGEN, HH ;

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OSGOOD, RM .

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[10] TEMPERATURE RISE INDUCED BY A LASER-BEAM [J].

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