SELECTIVE LOW-POWER PLASMA DECOMPOSITION OF SILANE-METHANE MIXTURES FOR THE PREPARATION OF METHYLATED AMORPHOUS-SILICON

被引：179
作者：
SOLOMON, I
SCHMIDT, MP
TRANQUOC, H
机构：
来源：
PHYSICAL REVIEW B | 1988年 / 38卷 / 14期
关键词：
D O I：
10.1103/PhysRevB.38.9895
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：9895 / 9901
页数：7
相关论文
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