FOCUSED ION-BEAM TECHNOLOGY

被引：0
|
作者：
OCHIAI, Y
MATSUI, S
MORI, K
机构：
[1] NEC, Kawasaki, Jpn, NEC, Kawasaki, Jpn
来源：
SOLID STATE TECHNOLOGY | 1987年 / 30卷 / 11期
关键词：
ASIC FABRICATION - DIRECT WRITE PATTERNING - FEATURE SIZES;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：75 / 79
页数：5
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