EFFECT OF ADSORBATES AND INSULATING LAYERS ON THE CONDUCTANCE OF PLASMA DEPOSITED A-SI-H

被引:56
作者
TANIELIAN, M [1 ]
CHATANI, M [1 ]
FRITZSCHE, H [1 ]
SMID, V [1 ]
PERSANS, PD [1 ]
机构
[1] UNIV CHICAGO,DEPT PHYS,CHICAGO,IL 60637
关键词
D O I
10.1016/0022-3093(80)90656-0
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:575 / 580
页数:6
相关论文
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