CHEMICAL VAPOR-DEPOSITION OF ALUMINUM FROM TRIMETHYLAMINE-ALANE

被引：66

作者：

BEACH, DB

BLUM, SE

LEGOUES, FK

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 05期

关键词：

D O I：

10.1116/1.576322

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3117 / 3118

页数：2

共 9 条

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