EFFECT OF OXIDATION ON ANOMALOUS DIFFUSION IN SILICON

被引：27
作者：
DOBSON, PS
机构：
来源：
PHILOSOPHICAL MAGAZINE | 1971年 / 24卷 / 189期
关键词：
D O I：
10.1080/14786437108217030
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：567 / &
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