EFFECT OF OXIDATION ON ANOMALOUS DIFFUSION IN SILICON

[1] ATALLA MM, 1960, PROPERTIES ELEMENTAL, V5, P163

[2] CARSLAW HS, 1967, CONDUCTION HEAT SOLI, P388

[3] BULK DIFFUSION OF PHOSPHORUS IN SILICON IN HYDROGEN ATMOSPHERE [J]. APPLIED PHYSICS LETTERS, 1970, 17 (04) : 137 - &

[4] HALES R, IN PRESS

[5] MATTER TRANSPORT IN SOLIDS [J]. REPORTS ON PROGRESS IN PHYSICS, 1964, 27 : 161 - 240

[6] ANNEALING OF VACANCIES IN DILUTE ALLOYS [J]. PHILOSOPHICAL MAGAZINE, 1965, 11 (114): : 1179 - &

[7] HOWARD RE, 1963, J PHYS SOC JAPAN S, V18, P197

[8] LACHAPPELLE TJ, 1957, AF18603117 CONTR

[9] LIDIARD AB, 1955, PHILOS MAG, V46, P1218

[10] OXIDATION, DEFECTS AND VACANCY DIFFUSION IN SILICON [J]. PHILOSOPHICAL MAGAZINE, 1969, 20 (167): : 881 - &

[1] ATALLA MM, 1960, PROPERTIES ELEMENTAL, V5, P163

[2] CARSLAW HS, 1967, CONDUCTION HEAT SOLI, P388

[3] BULK DIFFUSION OF PHOSPHORUS IN SILICON IN HYDROGEN ATMOSPHERE [J]. APPLIED PHYSICS LETTERS, 1970, 17 (04) : 137 - &

[4] HALES R, IN PRESS

[5] MATTER TRANSPORT IN SOLIDS [J]. REPORTS ON PROGRESS IN PHYSICS, 1964, 27 : 161 - 240

[6] ANNEALING OF VACANCIES IN DILUTE ALLOYS [J]. PHILOSOPHICAL MAGAZINE, 1965, 11 (114): : 1179 - &

[7] HOWARD RE, 1963, J PHYS SOC JAPAN S, V18, P197

[8] LACHAPPELLE TJ, 1957, AF18603117 CONTR

[9] LIDIARD AB, 1955, PHILOS MAG, V46, P1218

[10] OXIDATION, DEFECTS AND VACANCY DIFFUSION IN SILICON [J]. PHILOSOPHICAL MAGAZINE, 1969, 20 (167): : 881 - &