TILT ANGLE AND MASK EDGE ANGLE DEPENDENCES OF LATERAL SPREAD OF IMPLANTED BORON IONS UNDER MASK EDGE

被引：3
作者：
TSUCHIYA, T
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 11期
关键词：
D O I：
10.1063/1.327532
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：5773 / 5780
页数：8
相关论文
共 50 条
[41]   Collisionless pitch angle scattering of plasma ions at the edge region of a field-reversed configuration [J].
Takahashi, T ;
Tomita, Y ;
Momota, H ;
Shabrov, NV .
PHYSICS OF PLASMAS, 1997, 4 (12) :4301-4308
[42]   The role of stress on the shape of the amorphous-crystalline interface and mask-edge defect formation in ion-implanted silicon [J].
Ross, CE ;
Jones, KS .
SILICON FRONT-END JUNCTION FORMATION-PHYSICS AND TECHNOLOGY, 2004, 810 :449-454
[43]   Lateral Center-edge Angle of 18° (Bone-Edge): Threshold for Hip Arthroscopy Treatment in Patients with Borderline Developmental Dysplasia of the Hip? [J].
Zhang, Jia ;
Li, Chunbao ;
Zhang, Jianping ;
Zhao, Gang ;
Liu, Yujie .
ORTHOPAEDIC SURGERY, 2023, 15 (10) :2665-2673
[44]   ANALYSIS OF THE TILT AND ROTATION ANGLE DEPENDENCE OF BORON DISTRIBUTIONS IMPLANTED INTO LESS-THAN 100 GREATER-THAN SILICON [J].
KLEIN, KM ;
PARK, C ;
TASCH, AF ;
SIMONTON, RB ;
NOVAK, S .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1991, 138 (07) :2102-2107
[45]   Nanoscale Pattern Definition by Edge Oxidation of Silicon under the Si3N4 mask - PaDEOx [J].
Zaborowski, M. ;
Grabiec, P. ;
Dobrowolski, R. ;
Panas, A. ;
Skwara, K. ;
Szmigiel, D. ;
Wzorek, M. .
ACTA PHYSICA POLONICA A, 2009, 116 :S139-S141
[46]   JOSEPHSON BEHAVIOR AND FLUX-PENETRATION EFFECTS IN YBCO DOUBLE TILT-ANGLE STEP-EDGE JUNCTIONS [J].
FOLEY, CP ;
SLOGGETT, GJ ;
MULLER, KH ;
LAM, S ;
SAVVIDES, N ;
KATSAROS, A ;
MATTHEWS, DN .
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1995, 5 (02) :2805-2808
[47]   SMALL-ANGLE MULTIPLE-SCATTERING OF IONS IN SCREENED COULOMB REGION .2. LATERAL SPREAD [J].
MARWICK, AD ;
SIGMUND, P .
NUCLEAR INSTRUMENTS & METHODS, 1975, 126 (03) :317-323
[48]   FINITE DEFLECTIONS OF UNSYMMETRIC ANGLE-PLY ANISOTROPIC RECTANGULAR PLATE UNDER EDGE MOMENTS [J].
PRABHAKARA, MK .
JOURNAL OF APPLIED MECHANICS-TRANSACTIONS OF THE ASME, 1977, 44 (01) :171-172
[49]   Improved Identification of Adolescent Hip Dysplasia Using a Screening Method Based on Lateral Center Edge Angle Measurements [J].
Albar, Abeer ;
Sher, Andrew C. ;
Rosenfeld, Scott ;
Ditzler, Matt ;
Kraus, Steve ;
Crowe, James ;
Sangi-Haghpeykar, Haleh ;
Kan, Herman .
ACADEMIC RADIOLOGY, 2023, 30 (10) :2140-2146
[50]   Do Changes in Pelvic Rotation and Tilt Affect Measurement of the Anterior Center Edge Angle on False Profile Radiographs? A Cadaveric Study [J].
Putnam, Sara M. ;
Clohisy, John C. ;
Nepple, Jeffrey J. .
CLINICAL ORTHOPAEDICS AND RELATED RESEARCH, 2019, 477 (05) :1066-1072
12345