TILT ANGLE AND MASK EDGE ANGLE DEPENDENCES OF LATERAL SPREAD OF IMPLANTED BORON IONS UNDER MASK EDGE

被引：3
|
作者：
TSUCHIYA, T
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 11期
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D O I：
10.1063/1.327532
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：5773 / 5780
页数：8
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