LOCAL ENVIRONMENT OF ARSENIC IMPURITIES IN SEMI-INSULATING POLYCRYSTALLINE SILICON

被引：5

作者：

CANOVA, E ^{[1
]}

KAO, YH ^{[1
]}

MARSHALL, T ^{[1
]}

ARNOLD, E ^{[1
]}

机构：

[1] N AMER PHILIPS CORP,PHILIPS LABS,BRIARCLIFF MANOR,NY 10510

来源：

PHYSICAL REVIEW B | 1989年 / 39卷 / 05期

关键词：

D O I：

10.1103/PhysRevB.39.3131

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3131 / 3137

页数：7

共 22 条

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