FREE-STANDING PHOTORESIST FILMS FOR MICROLITHOGRAPHY

被引：1
|
作者：
LITTLE, JW [1 ]
CALLCOTT, TA [1 ]
ARAKAWA, ET [1 ]
机构：
[1] OAK RIDGE NATL LAB,DIV HLTH & SAFETY RES,OAK RIDGE,TN 37830
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1980年 / 51卷 / 11期
关键词：
D O I：
10.1063/1.1136106
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：1581 / 1583
页数：3
相关论文
共 50 条
  • [31] Photoexcited elastic waves in free-standing GaAs films
    Photiadis, D. M.
    Zalalutdinov, M. K.
    Bracker, A. S.
    Carter, S. G.
    Gammon, D.
    Houston, B. H.
    PHYSICAL REVIEW B, 2020, 101 (24)
  • [32] Texture analysis of CVD free-standing diamond films
    Chen, L
    Mao, WM
    Feng, HP
    Lu, FX
    TEXTURE AND ANISOTROPY OF POLYCRYSTALS II, 2005, 105 : 421 - 426
  • [33] Structural and optical properties of free-standing smectic films
    Sliwa, Izabela
    Zakharov, A. V.
    EUROPEAN PHYSICAL JOURNAL E, 2019, 42 (06):
  • [34] Microstructure and texture in free-standing CVD diamond films
    Feng, H
    Zhu, H
    Mao, W
    Chen, L
    Lü, F
    ICOTOM 14: TEXTURES OF MATERIALS, PTS 1AND 2, 2005, 495-497 : 1365 - 1369
  • [35] Nucleation of filaments of the TGBA phase in free-standing films
    Lejcek, Lubor
    Novotna, Vladimira
    Glogarova, Milada
    LIQUID CRYSTALS, 2018, 45 (02) : 173 - 179
  • [36] Free-standing two-dimensional Au films
    Shi-Zhuang Gao
    Mu Yang
    Qing-Yun Xiang
    Yu Wang
    Huan Zhang
    Yang Bai
    Wen-Qing Yao
    Jiang-Li Cao
    RareMetals, 2022, 41 (12) : 4235 - 4240
  • [37] Tensile properties of free-standing aluminum thin films
    Read, DT
    Cheng, YW
    Keller, RR
    McColskey, JD
    SCRIPTA MATERIALIA, 2001, 45 (05) : 583 - 589
  • [38] Investigation of refractive indices of free-standing films by ellipsometry
    Okumoto, Y
    Kimura, M
    Akahane, T
    Matsuhashi, N
    Yoshida, M
    Tadokoro, T
    MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 2004, 413 : 2227 - 2234
  • [39] Free-standing diamond films grown on cobalt substrates
    Neto, MA
    Fan, QH
    Pereira, E
    DIAMOND AND RELATED MATERIALS, 2001, 10 (3-7) : 316 - 321
  • [40] Optical Characterization of Free-Standing Porous Silicon Films
    S. Guha
    Peter Steiner
    F. Kozlowski
    W. Lang
    Journal of Porous Materials, 1997, 4 : 227 - 237
12345