FREE-STANDING PHOTORESIST FILMS FOR MICROLITHOGRAPHY

被引：1
|
作者：
LITTLE, JW [1 ]
CALLCOTT, TA [1 ]
ARAKAWA, ET [1 ]
机构：
[1] OAK RIDGE NATL LAB,DIV HLTH & SAFETY RES,OAK RIDGE,TN 37830
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1980年 / 51卷 / 11期
关键词：
D O I：
10.1063/1.1136106
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：1581 / 1583
页数：3
相关论文
共 50 条
  • [1] Free-Standing, Flexible, Superomniphobic Films
    Vahabi, Hamed
    Wang, Wei
    Movafaghi, Sanli
    Kota, Arun K.
    ACS APPLIED MATERIALS & INTERFACES, 2016, 8 (34) : 21962 - 21967
  • [2] Colloids on free-standing smectic films
    Conradi, M.
    Ziherl, P.
    Sarlah, A.
    Musevic, I.
    EUROPEAN PHYSICAL JOURNAL E, 2006, 20 (02): : 231 - 236
  • [3] Free-standing, flexible, superomniphobic films
    Vahabi, Hamed
    Wang, Wei
    Movafaghi, Sanli
    Kota, Arun
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2017, 254
  • [4] Colloids on free-standing smectic films
    M. Conradi
    P. Ziherl
    A. Šarlah
    I. Muševič
    The European Physical Journal E, 2006, 20 : 231 - 236
  • [5] Microactuators of free-standing TiNiCu films
    Fu, Y. Q.
    Luo, J. K.
    Flewitt, A. J.
    Ong, S. E.
    Zhang, S.
    Du, H. J.
    Milne, W. I.
    SMART MATERIALS AND STRUCTURES, 2007, 16 (06) : 2651 - 2657
  • [6] Physics of Free-Standing Lyotropic Films
    Pieranski, Pawel
    MATERIALS, 2014, 7 (05) : 3453 - 3469
  • [7] Electrosyntheses of free-standing poly (dibenzofuran) films
    Xu, Jingkun
    Zhou, Weiqiang
    Hou, Jian
    Pu, Shouzhi
    Wei, Zhenhong
    Wang, Jingwu
    MATERIALS LETTERS, 2006, 60 (21-22) : 2569 - 2572
  • [8] Mechanical testing of free-standing thin films
    Sharpe, WN
    Hemker, KJ
    SURFACE ENGINEERING 2001 - FUNDAMENTALS AND APPLICATIONS, 2001, 697 : 215 - 226
  • [9] Free-standing smectic films at high temperature
    Cluzeau, P
    Joly, G
    Nguyen, HT
    Gors, C
    Dolganov, VK
    LIQUID CRYSTALS, 2002, 29 (04) : 505 - 513
  • [10] Uniplanar smectic phases in free-standing films
    Rovsek, B
    Cepic, M
    Zeks, B
    PHYSICAL REVIEW E, 2000, 62 (03): : 3758 - 3765
12345