DATA-PROCESSING SYSTEM OF ELECTRON-BEAM LITHOGRAPHY FOR VLSI MICROFABRICATION

被引：9
|
作者：
SUGIYAMA, N
KAWAJI, A
TARUI, Y
机构：
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1979年 / 26卷 / 04期
关键词：
D O I：
10.1109/T-ED.1979.19476
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：675 / 685
页数：11
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