SIMPLE METHOD FOR FABRICATING LINES OF 0.15-MU WIDTH USING OPTICAL LITHOGRAPHY

被引：17
作者：
JELKS, EC
KERBER, GL
WILCOX, HA
机构：
来源：
APPLIED PHYSICS LETTERS | 1979年 / 34卷 / 01期
关键词：
D O I：
10.1063/1.90586
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：28 / 30
页数：3
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