TUNGSTEN - AN ALTERNATIVE TO GOLD FOR X-RAY MASKS

被引：26

作者：

KARNEZOS, M

RUBY, R

HEFLINGER, B

NAKANO, H

JONES, R

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.583884

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：283 / 287

页数：5

共 14 条

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[9]

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[10] PROXIMITY EFFECT CORRECTION FOR ELECTRON-BEAM LITHOGRAPHY BY EQUALIZATION OF BACKGROUND DOSE [J].

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