ION-IMPLANTED JUNCTION FORMATION IN HG1-XCDXTE

被引:50
作者
BUBULAC, LO
TENNANT, WE
LO, DS
EDWALL, DD
ROBINSON, JC
CHEN, JS
BOSTRUP, G
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 05期
关键词
D O I
10.1116/1.574861
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:3166 / 3170
页数:5
相关论文
共 13 条
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    BUBULAC, LO
    [J]. APPLIED PHYSICS LETTERS, 1985, 46 (10) : 976 - 978
  • [2] BORON AND INDIUM ION-IMPLANTED JUNCTIONS IN HGCDTE GROWN ON CDTE AND CDTE/AL2O3
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    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (04): : 2169 - 2173
  • [3] P ON N ION-IMPLANTED JUNCTIONS IN LIQUID-PHASE EPITAXY HGCDTE LAYERS ON CDTE SUBSTRATES
    BUBULAC, LO
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    ROBINSON, JC
    BOSTRUP, G
    [J]. APPLIED PHYSICS LETTERS, 1987, 50 (22) : 1586 - 1588
  • [4] BEHAVIOR OF IMPLANTATION-INDUCED DEFECTS IN HGCDTE
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    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (01): : 251 - 254
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    DESTEFANIS, GL
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (01): : 171 - 175
  • [7] ION-IMPLANTATION IN HG1-XCDXTE
    DESTEFANIS, GL
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 567 - 580
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  • [9] FORMATION OF P-PHOTODIODES ON N-PHOTODIODES IN HG1-XCDXTE BY ION-IMPLANTATION AND CW CO2-LASER ANNEALING
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    [J]. JOURNAL OF CRYSTAL GROWTH, 1985, 72 (1-2) : 474 - 477
  • [10] STUDY OF IMPLANTATION IN HGCDTE BY ELECTROLYTE ELECTROREFLECTANCE
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    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (05): : 3180 - 3183