ION-IMPLANTED JUNCTION FORMATION IN HG1-XCDXTE

被引:50
作者
BUBULAC, LO
TENNANT, WE
LO, DS
EDWALL, DD
ROBINSON, JC
CHEN, JS
BOSTRUP, G
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 05期
关键词
D O I
10.1116/1.574861
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:3166 / 3170
页数:5
相关论文
共 13 条
[1]   DEPENDENCE OF JUNCTION FORMATION ON SUBSTRATE IN IMPLANTED HGCDTE [J].
BUBULAC, LO .
APPLIED PHYSICS LETTERS, 1985, 46 (10) :976-978
[2]   BORON AND INDIUM ION-IMPLANTED JUNCTIONS IN HGCDTE GROWN ON CDTE AND CDTE/AL2O3 [J].
BUBULAC, LO ;
LO, DS ;
TENNANT, WE ;
EDWALL, DD ;
ROBINSON, JC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (04) :2169-2173
[3]   P ON N ION-IMPLANTED JUNCTIONS IN LIQUID-PHASE EPITAXY HGCDTE LAYERS ON CDTE SUBSTRATES [J].
BUBULAC, LO ;
LO, DS ;
TENNANT, WE ;
EDWALL, DD ;
CHEN, JC ;
RATUSNIK, J ;
ROBINSON, JC ;
BOSTRUP, G .
APPLIED PHYSICS LETTERS, 1987, 50 (22) :1586-1588
[4]   BEHAVIOR OF IMPLANTATION-INDUCED DEFECTS IN HGCDTE [J].
BUBULAC, LO ;
TENNANT, WE ;
RIEDEL, RA ;
MAGEE, TJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (01) :251-254
[5]  
BUBULAC LO, IN PRESS APPL PHYS L
[6]   INDIUM ION-IMPLANTATION IN HG0.78CD0.22TE/CDTE [J].
DESTEFANIS, GL .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (01) :171-175
[7]   ION-IMPLANTATION IN HG1-XCDXTE [J].
DESTEFANIS, GL .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :567-580
[8]  
DESTEFANIS GL, 1986, 3RD INT C ADV IR DET
[9]   FORMATION OF P-PHOTODIODES ON N-PHOTODIODES IN HG1-XCDXTE BY ION-IMPLANTATION AND CW CO2-LASER ANNEALING [J].
KALISH, R ;
BAHIR, G .
JOURNAL OF CRYSTAL GROWTH, 1985, 72 (1-2) :474-477
[10]   STUDY OF IMPLANTATION IN HGCDTE BY ELECTROLYTE ELECTROREFLECTANCE [J].
RACCAH, PM ;
GARLAND, JW ;
ZHANG, Z ;
YANG, D ;
BUBULAC, LO ;
TENNANT, WE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (05) :3180-3183