VOLATILE AND ADSORBED SPECIES FROM MICROELECTRONIC ADHESIVES

被引：0

作者：

BENSON, RC

NALL, BH

DEHAAS, N

ROMENESKO, BM

CHARLES, HK

COLTON, RJ

机构：

[1] Johns Hopkins Univ, Laurel, MD, USA, Johns Hopkins Univ, Laurel, MD, USA

来源：

SAMPE JOURNAL | 1987年 / 23卷 / 06期

关键词：

MICROELECTRONICS - Plastics Applications - ORGANIC COMPOUNDS - Adsorption - VAPORS - Chemical Analysis;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Microelectronic adhesives have been investigated to determine volatile and adsorbed species that evolve during cure and after postcure processing, such as extended heating (as in burn-in tests). Stable volatile species were measured using mass spectrometric methods. Some of these volatile species interact strongly with surfaces and remain adsorbed. Other, non-volatile, species are transported from the bulk adhesive via surface diffusion. The adsorbed species were measured using Auger electron spectroscopy and X-ray photoelectron spectroscopy. The effect of UV/ozone and argon plasma in removing these adsorbed species was investigated. And, after cleaning, the effect of extended heating on adsorbed species from cured adhesives was studied.

引用

页码：27 / 33

页数：7