HYDROGEN-ION IMPLANTATION PROFILES AS DETERMINED BY SIMS

被引：36

作者：

MAGEE, CW

WU, CP

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1978年 / 149卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(78)90921-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：529 / 533

页数：5

共 9 条

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[9] PROFILING HYDROGEN IN MATERIALS USING ION-BEAMS [J].

ZIEGLER, JF ;

WU, CP ;

WILLIAMS, P ;

WHITE, CW ;

TERREAULT, B ;

SCHERZER, BMU ;

SCHULTE, RL ;

SCHNEID, EJ ;

MAGEE, CW ;

LIGEON, E ;

LECUYER, J ;

LANFORD, WA ;

KUEHNE, FJ ;

KAMYKOWSKI, EA ;

HOFER, WO ;

GUIVARCH, A ;

FILLEUX, CH ;

DELINE, VR ;

EVANS, CA ;

COHEN, BL ;

CLARK, GJ ;

CHU, WK ;

BRASSARD, C ;

BLEWER, RS ;

BEHRISCH, R ;

APPLETON, BR ;

ALLRED, DD .

NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3) :19-39

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