OPTICAL MEASUREMENT OF THE RMS ROUGHNESS OF ION-IMPLANTED SURFACES

被引：1

作者：

CORRELL, FD ^{[1
]}

FERGUSON, CD ^{[1
]}

KANT, RA ^{[1
]}

机构：

[1] USN,RES LAB,WASHINGTON,DC 20375

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 24-5卷

关键词：

D O I：

10.1016/0168-583X(87)90713-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：581 / 583

页数：3

相关论文

共 12 条

[1] EXPERIMENTAL STUDY OF INFLUENCE OF ANGLE OF INCIDENCE OF PRIMARY ELECTRONS ON PRODUCTION OF AUGER EMISSION
ALLIE, G
BLANC, E
DUFAYARD, D
STERN, RM
[J]. SURFACE SCIENCE, 1974, 46 (01) : 188 - 196
[2] SURFACE-ROUGHNESS EFFECTS ON THE ENERGY DISPERSION OF BACKSCATTERED PROTONS
BARRAGAN, A
SANTIBANEZ, FG
[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 39 (01): : 61 - 64
[3] COMPARISON OF TECHNIQUES FOR MEASURING THE ROUGHNESS OF OPTICAL-SURFACES
BENNETT, JM
[J]. OPTICAL ENGINEERING, 1985, 24 (03) : 380 - 387
[4] BENNETT JM, 1985, OPTICS NEWS JUL, P17
[5] EFFECTS OF RANDOM SURFACE-ROUGHNESS IN PIXE ANALYSIS OF THICK TARGETS
CAMPBELL, JL
LAMB, RD
LEIGH, RG
NICKEL, BG
COOKSON, JA
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 12 (03) : 402 - 412
[6] TILTING ANGLE DEPENDENCE OF RUTHERFORD BACKSCATTERING - UNIFORMITY OF NEAR-SURFACE LAYERS
CAMPISANO, SU
CIAVOLA, G
COSTANZO, E
FOTI, G
RIMINI, E
[J]. NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3): : 229 - 233
[7] SURFACE-TOPOLOGY USING RUTHERFORD BACKSCATTERING
EDGE, RD
BILL, U
[J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3): : 157 - 162
[8] SURFACE-ROUGHNESS MEASUREMENTS OF LOW-SCATTER MIRRORS AND ROUGHNESS STANDARDS
GUENTHER, KH
WIERER, PG
BENNETT, JM
[J]. APPLIED OPTICS, 1984, 23 (21): : 3820 - 3836
[9] KANT RA, 9TH INT C APPL ACC R
[10] KNUDSON AR, 1980, NUCL INSTR METH, V168, P168