SPECTROSCOPIC INVESTIGATION OF REACTIVE SPUTTERING OF ALUMINIUM

[1] COHEURDEHALU FP, 1937, B ACAD ROY BELGIUM, V23, P604

[2] DAYTON BB, 1959, 6 T AM VAC S

[3] HERZBERG G, 1950, MOLECULAR SPECTRA MO

[4] The Mechanism of Reactive Sputtering [J]. JOURNAL OF MATERIALS SCIENCE, 1968, 3 (05) : 544 - 552

[5] MAISSEL LI, 1966, PHYSICS THIN FILMS

[6] ROSEN B, 1945, PHYS REV, V68, P24

[7] SCHWARTZ N, 1963, 10 T NATL S VAC TECH

[8] INVESTIGATION OF SPUTTERING OF ALUMINUM USING ATOMIC-ABSORPTION SPECTROSCOPY [J]. JOURNAL OF APPLIED PHYSICS, 1970, 41 (02) : 742 - &

[9] GETTER SPUTTERING FOR PREPARATION OF THIN FILMS OF SUPERCONDUCTING ELEMENTS + COMPOUNDS [J]. JOURNAL OF APPLIED PHYSICS, 1964, 35 (3P1) : 554 - &

[10] WEHNER GK, 1961, 5 P INT C ION PHEN G, P1141

[1] COHEURDEHALU FP, 1937, B ACAD ROY BELGIUM, V23, P604

[2] DAYTON BB, 1959, 6 T AM VAC S

[3] HERZBERG G, 1950, MOLECULAR SPECTRA MO

[4] The Mechanism of Reactive Sputtering [J]. JOURNAL OF MATERIALS SCIENCE, 1968, 3 (05) : 544 - 552

[5] MAISSEL LI, 1966, PHYSICS THIN FILMS

[6] ROSEN B, 1945, PHYS REV, V68, P24

[7] SCHWARTZ N, 1963, 10 T NATL S VAC TECH

[8] INVESTIGATION OF SPUTTERING OF ALUMINUM USING ATOMIC-ABSORPTION SPECTROSCOPY [J]. JOURNAL OF APPLIED PHYSICS, 1970, 41 (02) : 742 - &

[9] GETTER SPUTTERING FOR PREPARATION OF THIN FILMS OF SUPERCONDUCTING ELEMENTS + COMPOUNDS [J]. JOURNAL OF APPLIED PHYSICS, 1964, 35 (3P1) : 554 - &

[10] WEHNER GK, 1961, 5 P INT C ION PHEN G, P1141