ENERGY-SPECTRA AND CHARGE FRACTIONS FOR KEV HYDROGEN AND HELIUM BACKSCATTERED FROM SILICON

Energy spectra and charge fractions for hydrogen and helium backscattered from silicon targets are reported. The primary energy of the incident particle varies from 5 to 15 keV. The backscattered energy distributions are measured down to 500 eV and the results are compared to a Monte-Carlo computer simulation. Good agreement is found between the theoretical model and the experimental data. Charge fractions are measured by differentiating between scattered ions and neutrals. For hydrogen, neutralization occurs primarily at the surface for the backscattered particles and no depth effects are found. Helium shows a large peak in the ion yield for surface scattering with a much reduced ion yield for particles scattered from within the solid. © 1979.