PROFILING HYDROGEN IN MATERIALS USING ION-BEAMS

被引：187

作者：

ZIEGLER, JF

WU, CP

WILLIAMS, P

WHITE, CW

TERREAULT, B

SCHERZER, BMU

SCHULTE, RL

SCHNEID, EJ

MAGEE, CW

LIGEON, E

LECUYER, J

LANFORD, WA

KUEHNE, FJ

KAMYKOWSKI, EA

HOFER, WO

GUIVARCH, A

FILLEUX, CH

DELINE, VR

EVANS, CA

COHEN, BL

CLARK, GJ

CHU, WK

BRASSARD, C

BLEWER, RS

BEHRISCH, R

APPLETON, BR

ALLRED, DD

机构：

[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

[2] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37830

[3] UNIV QUEBEC,CTR ENERGIE,INRS,1020 VARENNES,QUEBEC,CANADA

[4] MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER

[5] GRUMMAN AEROSP CORP,DEPT RES,BETHPAGE,NY 11714

[6] RCA LABS,PRINCETON,NJ 08540

[7] CEN,PHYS SOLIDES SECT,F-38041 GRENOBLE,FRANCE

[8] CTR NATL TELECOMMUN,PMT,F-22301 LANNION,FRANCE

[9] CALTECH,KELLOGG RADIAT LAB,PASADENA,CA 91125

[10] UNIV MONTREAL,PHYS NUCL LAB,MONTREAL 101,QUEBEC,CANADA

[11] UNIV ILLINOIS,SCH CHEM SCI,URBANA,IL 61801

[12] YALE UNIV,DEPT PHYS,NUCL STRUCT LAB,NEW HAVEN,CT 06520

[13] UNIV PITTSBURGH,DEPT PHYS,PITTSBURGH,PA 15213

[14] IBM CORP,DIV SP,HOPEWELL JUNCTION,NY 12533

[15] SANDIA LABS,DIV APPL PHYS,ALBUQUERQUE,NM 87115

来源：

NUCLEAR INSTRUMENTS & METHODS | 1978年 / 149卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(78)90834-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：19 / 39

页数：21

共 72 条

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[2]

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[4]

BEHRISCH R, 1976, ION BEAM SURFACE LAY, P539

[5]

Blewer R.S., 1976, ION BEAM SURFACE LAY, P185

[6] USING PROTON BACKSCATTERING METHOD OF LIGHT-ELEMENT PROFILING TO ACHIEVE TAILORED LOW-Z IMPURITY DISTRIBUTIONS IN SOLIDS [J].

BLEWER, RS .

NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3) :47-52

[7] DEPTH DISTRIBUTION OF IMPLANTED HELIUM AND OTHER LOW-Z ELEMENTS IN METAL-FILMS USING PROTON BACKSCATTERING [J].

BLEWER, RS .

APPLIED PHYSICS LETTERS, 1973, 23 (11) :593-595

[8] PROTON BACKSCATTERING AS A TECHNIQUE FOR LIGHT ION SURFACE INTERACTION STUDIES IN CTR MATERIALS INVESTIGATIONS [J].

BLEWER, RS .

JOURNAL OF NUCLEAR MATERIALS, 1974, 53 (01) :268-275

[9]

BLEWER RS, C TECHNOLOGY CONTROL, V2, P525

[10] DEFECT STUDIES IN CRYSTALS BY MEANS OF CHANNELING [J].

BOGH, E .

CANADIAN JOURNAL OF PHYSICS, 1968, 46 (06) :653-&

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