PHASE-TRANSFORMATION DURING CVD OF ALUMINUM-OXIDE

被引：6
|
作者：
FREDRIKSSON, E
CARLSSON, JO
机构：
来源：
JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C-5期
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D O I：
10.1051/jphyscol:1989547
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学科分类号：
摘要：
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页码：391 / 399
页数：9
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