PHASE-TRANSFORMATION DURING CVD OF ALUMINUM-OXIDE

被引:6
|
作者
FREDRIKSSON, E
CARLSSON, JO
机构
来源
JOURNAL DE PHYSIQUE | 1989年 / 50卷 / C-5期
关键词
D O I
10.1051/jphyscol:1989547
中图分类号
学科分类号
摘要
引用
收藏
页码:391 / 399
页数:9
相关论文
共 50 条
  • [1] NUCLEATION AND GROWTH OF ALUMINUM-OXIDE ON SILICON IN THE CVD PROCESS
    CHOI, SW
    KIM, C
    KIM, JG
    CHUN, JS
    JOURNAL OF MATERIALS SCIENCE, 1987, 22 (03) : 1051 - 1056
  • [2] PHASE-TRANSFORMATIONS IN ALUMINUM-OXIDE FIBERS
    LYSAK, SV
    DERGAPUTSKAYA, LA
    KALINOVSKAYA, IN
    GAODU, AN
    KARYAKINA, EL
    INORGANIC MATERIALS, 1985, 21 (05) : 696 - 701
  • [3] ARF EXCIMER LASER-INDUCED CVD OF ALUMINUM-OXIDE FILMS
    MINAKATA, M
    FURUKAWA, Y
    JOURNAL OF ELECTRONIC MATERIALS, 1986, 15 (03) : 159 - 164
  • [4] EPR STUDIES OF ALUMINUM-OXIDE PHASE COMPOSITIONS
    SHIYAN, IN
    SERIKOV, LV
    SMEKALINA, TV
    VASILIEV, AA
    REACTION KINETICS AND CATALYSIS LETTERS, 1990, 41 (02): : 291 - 294
  • [5] THE AMORPHOUS TO CRYSTALLINE TRANSFORMATION OF ANODIC ALUMINUM-OXIDE DURING ANODIZATION IN AN AMMONIUM CITRATE ELECTROLYTE
    HUTCHINS, GA
    CHEN, CT
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (07) : 1332 - 1337
  • [6] PHASE-TRANSFORMATION DURING CRYSTALLIZATION OF ZNS
    SAKAGUCHI, M
    OHTA, M
    SATOH, M
    HIRABAYASHI, T
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (04) : 550 - 553
  • [7] ON ALUMINA PHASE-TRANSFORMATION AND CRUST FORMATION IN ALUMINUM CELLS
    OEDEGARD, R
    ROENNING, S
    ROLSETH, S
    THONSTAD, J
    JOURNAL OF METALS, 1984, 36 (12): : 62 - 62
  • [8] SHOCK PHASE-TRANSFORMATION AND RELEASE PROPERTIES OF ALUMINUM NITRIDE
    KIPP, ME
    GRADY, DE
    JOURNAL DE PHYSIQUE IV, 1994, 4 (C8): : 249 - 256
  • [9] PHASE-EQUILIBRIA AND PHASE-TRANSFORMATION IN THE ALUMINUM NITRIDE ALUMINUM OXYCARBIDE PSEUDOBINARY SYSTEM
    KUO, SY
    VIRKAR, AV
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1989, 72 (04) : 540 - 550
  • [10] ADSORPTION OF ORGANOSULFUR COMPOUNDS ON ALUMINUM-OXIDE AND SILICA MODIFIED WITH ALUMINUM-OXIDE
    ULENDEEVA, AD
    LYGIN, VI
    LYAPINA, NK
    KINETICS AND CATALYSIS, 1979, 20 (04) : 799 - 804