SPECTRAL-ANALYSIS OF DEEP LEVEL TRANSIENT SPECTROSCOPY (SADLTS)

被引：38
作者：
MORIMOTO, J [1 ]
FUDAMOTO, M [1 ]
TAHIRA, K [1 ]
KIDA, T [1 ]
KATO, S [1 ]
MIYAKAWA, T [1 ]
机构：
[1] NATL DEF ACAD,DEPT ELECT ENGN,YOKOSUKA,KANAGAWA 239,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 10期
关键词：
D O I：
10.1143/JJAP.26.1634
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1634 / 1640
页数：7
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