TIME-RESOLVED SPECTROSCOPY OF AR-STAR-2-EXCIMER EMISSION

被引：29
作者：
DIEGELMANN, M [1 ]
WROBEL, WG [1 ]
HOHLA, K [1 ]
机构：
[1] MAX PLANCK GESELL,INST PLASMAPHYS,GARCHING,FED REP GER
来源：
APPLIED PHYSICS LETTERS | 1978年 / 33卷 / 06期
关键词：
D O I：
10.1063/1.90424
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：525 / 527
页数：3
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