PREPARATION AND PROPERTIES OF BI4TI3O12 SINGLE-CRYSTAL THIN-FILMS BY ATMOSPHERIC-PRESSURE METALORGANIC CHEMICAL-VAPOR-DEPOSITION

被引:33
作者
WANG, H
FU, LW
SHANG, SX
机构
[1] SHANDONG UNIV,INST CRYSTAL,JINAN 250100,PEOPLES R CHINA
[2] SHANDONG UNIV,DEPT OPT,JINAN 250100,PEOPLES R CHINA
[3] SHANDONG UNIV,CTR EXPTL,JINAN 250100,PEOPLES R CHINA
关键词
D O I
10.1063/1.353929
中图分类号
O59 [应用物理学];
学科分类号
摘要
Bismuth titanate (Bi4Ti3O12) thin films have been grown on (100) silicon substrates at 550-degrees-C by atmospheric Pressure metalorganic chemical vapor deposition using Bi (C6H5)3 and Ti (OC4H9)4 as the source materials. The x-ray diffraction analysis and reflection electron diffraction pattern revealed that the film is a single crystal with a (100) orientation. Ferroelectric properties were confirmed by polarization hysteresis curve observation. The remanent polarization and coercive field were found to be 38 muC/CM2 and 45 kV/cm, respectively. The measured dielectric constant and loss tangent were 93 and 0.05, respectively, at room temperature.
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页码:7963 / 7965
页数:3
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