OPTICAL SPECTROSCOPY FOR DIAGNOSTICS AND PROCESS-CONTROL DURING GLOW-DISCHARGE ETCHING AND SPUTTER DEPOSITION

被引：93
|
作者：
GREENE, JE
机构：
[1] UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801
[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 05期
关键词：
D O I：
10.1116/1.569834
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1718 / 1729
页数：12
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