STRESS COMPENSATION IN GA1-XALXAS1-YPY LPE LAYERS ON GAAS SUBSTRATES

被引:50
作者
ROZGONYI, GA [1 ]
PANISH, MB [1 ]
机构
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
关键词
D O I
10.1063/1.1654738
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:533 / 535
页数:3
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