STUDIES OF SURFACE-REACTIONS IN CHEMICAL VAPOR-DEPOSITION USING TIME RESOLVED MOLECULAR-BEAM REACTIVE SCATTERING

被引：0
作者：
YU, ML [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,DIV RES,YORKTOWN HTS,NY 10598
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1990年 / 200卷
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
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页码：65 / COLL
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