EFFECTS OF TA ADDITION IN CONI/CR DOUBLE-LAYER FILM SPUTTERED IN LOW AR GAS-PRESSURE

被引:7
作者
KAWANABE, T
NAOE, M
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D O I
10.1109/20.92224
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:2721 / 2723
页数:3
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