OXIDE BARRIERS ON GAAS BY NEUTRALIZED ION-BEAM SPUTTERING

被引：18
|
作者：
MEINERS, LG [1 ]
PAN, RP [1 ]
SITES, JR [1 ]
机构：
[1] COLORADO STATE UNIV,DEPT PHYS,FT COLLINS,CO 80523
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 04期
关键词：
D O I：
10.1116/1.569400
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：961 / 963
页数：3
相关论文
共 50 条
  • [1] TI/GAAS SCHOTTKY BARRIERS PREPARED BY ION-BEAM SPUTTERING
    COLA, A
    LUPO, MG
    VASANELLI, L
    VALENTINI, A
    JOURNAL OF APPLIED PHYSICS, 1992, 71 (10) : 4966 - 4971
  • [2] CURRENT TRANSPORT IN TI/GAAS SHOTTKY BARRIERS PREPARED BY ION-BEAM SPUTTERING
    DIDIO, M
    COLA, A
    LUPO, MG
    VASANELLI, L
    SOLID-STATE ELECTRONICS, 1995, 38 (11) : 1923 - 1928
  • [3] NEUTRALIZED ION-BEAM SPECTROSCOPY
    GELLENE, GI
    PORTER, RF
    ACCOUNTS OF CHEMICAL RESEARCH, 1983, 16 (06) : 200 - 207
  • [4] Ion-beam sputtering deposition of oxide coatings
    Tang, Xuefe
    Fan, Zhengxiu
    Wang, Zhijiang
    Guangxue Xuebao/Acta Optica Sinica, 1992, 12 (05): : 473 - 475
  • [5] SEMICONDUCTOR APPLICATIONS OF THIN-FILMS DEPOSITED BY NEUTRALIZED ION-BEAM SPUTTERING
    SITES, JR
    THIN SOLID FILMS, 1977, 45 (01) : 47 - 53
  • [6] ENVELOPE EQUATION FOR A NEUTRALIZED ION-BEAM
    LEMONS, DS
    THODE, LE
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1980, 25 (08): : 1011 - 1011
  • [7] ION-BEAM SPUTTERING AND DUAL-ION BEAM SPUTTERING OF TITANIUM-OXIDE FILMS
    CEVRO, M
    CARTER, G
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1995, 28 (09) : 1962 - 1976
  • [8] THE ION DISTRIBUTION FUNCTION OF THE NEUTRALIZED ION-BEAM IN GAS
    MARUSHCHENKO, NB
    FARENIK, VI
    UKRAINSKII FIZICHESKII ZHURNAL, 1989, 34 (11): : 1723 - 1727
  • [9] RECENT DEVELOPMENTS IN NEUTRALIZED ION-BEAM SPECTROSCOPY
    PORTER, RF
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1989, 197 : 47 - ANYL
  • [10] Ti/GaAs Schottky barriers prepared by ion beam sputtering
    1600, (71):
12345