PREPARATION AND PROPERTIES OF CARBON-FILMS WITH MAGNETRON SPUTTERING

被引：7
|
作者：
HOSOKAWA, N [1 ]
KONISHI, A [1 ]
HIRATSUKA, H [1 ]
ANNOH, K [1 ]
机构：
[1] JAPAN ATOM ENERGY RES INST,MIMATO KU,TOKYO,JAPAN
来源：
THIN SOLID FILMS | 1980年 / 73卷 / 01期
关键词：
D O I：
10.1016/0040-6090(80)90337-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：115 / 116
页数：2
相关论文
共 50 条
  • [1] PROPERTIES OF HYDROGENATED CARBON-FILMS PRODUCED BY REACTIVE MAGNETRON SPUTTERING
    MCKENZIE, DR
    BRIGGS, LM
    SOLAR ENERGY MATERIALS, 1981, 6 (01): : 97 - 106
  • [2] STRUCTURE AND MECHANICAL-PROPERTIES OF HYDROGENATED CARBON-FILMS PREPARED BY MAGNETRON SPUTTERING
    MARCHON, B
    VO, PN
    KHAN, MR
    AGER, JW
    IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (06) : 5160 - 5162
  • [3] DEPOSITION OF CARBON-FILMS BY BIAS MAGNETRON SPUTTERING IN NEON AND ARGON
    PETROV, I
    IVANOV, L
    ORLINOV, V
    KOURTEV, J
    JELEV, J
    THIN SOLID FILMS, 1990, 185 (02) : 247 - 256
  • [4] PREPARATION AND PROPERTIES OF DIAMONDLIKE CARBON-FILMS
    FRANKS, J
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03): : 2307 - 2310
  • [5] PREPARATION AND PROPERTIES OF SPUTTERED GLASSY CARBON-FILMS
    MARINKOVIC, Z
    ROY, R
    CARBON, 1976, 14 (06) : 329 - 331
  • [6] PRESSURE AND PLASMA EFFECTS ON THE PROPERTIES OF MAGNETRON SPUTTERED CARBON-FILMS
    ROSSNAGEL, SM
    RUSSAK, MA
    CUOMO, JJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 2150 - 2153
  • [7] Study on properties and preparation of films by Unbalanced Magnetron Sputtering
    Jin Jie
    Yang Jia
    Ni Mao-lin
    FRONTIERS OF MECHANICAL ENGINEERING AND MATERIALS ENGINEERING, PTS 1 AND 2, 2012, 184-185 : 1497 - 1500
  • [8] EFFECT OF SUBSTRATE BIAS ON THE PROPERTIES OF DIAMOND-LIKE CARBON-FILMS DEPOSITED USING UNBALANCED MAGNETRON SPUTTERING
    SEO, SC
    INGRAM, DC
    RICHARDSON, HH
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (06): : 2856 - 2862
  • [9] Preparation and properties of graphite-like carbon films fabricated by unbalanced magnetron sputtering
    Wang Yong-Jun
    Li Hong-Xuan
    Ji Li
    Liu Xiao-Hong
    Wu Yan-Xia
    Zhou Hui-Di
    Chen Jian-Min
    ACTA PHYSICA SINICA, 2012, 61 (05)
  • [10] Preparation of fluorinated amorphous carbon nitride films by magnetron sputtering
    Yokomichi, H
    SURFACE ENGINEERING, 2000, 16 (03) : 229 - 233
12345