SUBMICRON SIZING BY X-RAY TECHNIQUE

被引：0
|
作者：
MARTIN, JJ
BROWN, JH
DEBRUYN, PL
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1961年 / 108卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C65 / C65
页数：1
相关论文
共 50 条
  • [1] Submicron X-ray diffraction
    MacDowell, AA
    Celestre, RS
    Tamura, N
    Spolenak, R
    Valek, B
    Brown, WL
    Bravman, JC
    Padmore, HA
    Batterman, BW
    Patel, JR
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2001, 467 : 936 - 943
  • [2] An X-ray tomographic microscope with submicron resolution
    Stampanoni, M
    Borchert, GL
    Abela, R
    Patterson, B
    Vermeulen, D
    Rüegsegger, P
    Wyss, P
    ACTA PHYSICA POLONICA B, 2002, 33 (01): : 463 - 469
  • [3] Control of producing submicron X-ray masks
    State Scientific Research Physical, Problems Inst, Moscow, Russia
    Nucl Instrum Methods Phys Res Sect A, 2-3 (514-518):
  • [4] EVALUATION OF X-RAY RESISTS FOR SUBMICRON LITHOGRAPHY.
    Redaelli, R.
    Wells, G.M.
    Cerrina, F.
    Crapella, S.
    Vento, G.
    Microelectronic Engineering, 1987, 6 (1-4) : 519 - 525
  • [5] Submicron contact X-ray exposure alignment system
    Wang, J.H.
    Su, W.J.
    Ye, T.C.
    Liu, Y.Y.
    Weixi Jiagong Jishu/Microfabrication Technology, 2001, (01):
  • [6] X-ray diffraction effects in submicron slits and channels
    Ognev, LI
    X-RAY SPECTROMETRY, 2002, 31 (03) : 274 - 277
  • [7] XERORADIOGRAPH, X-RAY TECHNIQUE
    POWELL, RL
    JOURNAL OF SPEECH AND HEARING DISORDERS, 1965, 30 (03): : 282 - 283
  • [8] On the technique of X-ray cinematography
    不详
    DEUTSCHE MEDIZINISCHE WOCHENSCHRIFT, 1913, 39 : 663 - 663
  • [9] Fabrication of X-Ray Gratings Using X-Ray Lithography Technique for X-Ray Talbot Interferometer
    Noda, Daiji
    Tsujii, Hiroshi
    Takahashi, Naoki
    Hattori, Tadashi
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2009, 156 (05) : H299 - H302
  • [10] X-RAY MIRROR SURFACES EVALUATED BY AN X-RAY TOPOGRAPHICAL TECHNIQUE
    MANCINI, DC
    BILDERBACK, DH
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 208 (1-3): : 263 - 272
12345