SILANE DISSOCIATION MECHANISMS AND THIN-FILM FORMATION IN A LOW-PRESSURE MULTIPOLE DC DISCHARGE

被引：82

作者：

DREVILLON, B ^{[1
]}

HUC, J ^{[1
]}

LLORET, A ^{[1
]}

PERRIN, J ^{[1
]}

DEROSNY, G ^{[1
]}

SCHMITT, JPM ^{[1
]}

机构：

[1] ECOLE POLYTECH,PHYS MILIEUX IONISES LAB,F-91128 PALAISEAU,FRANCE

来源：

APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 07期

关键词：

D O I：

10.1063/1.92008

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：646 / 648

页数：3

共 12 条

[1] AMORPHOUS SILICON SOLAR-CELLS [J].

CARLSON, DE .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1977, 24 (04) :449-453

[2] PRODUCTION OF A VERY QUIESCENT PLASMA IN SKIPPING MAGNETIC FIELDS [J].

GOEDE, A ;

BRAKENHOFF, GJ ;

HOPMAN, HJ ;

MASSMANN, P .

PHYSICAL REVIEW LETTERS, 1971, 27 (16) :1044-+

[3] ION-MOLECULE REACTIONS IN SILANE [J].

HENIS, JMS ;

TRIPODI, MK ;

STEWART, GW ;

GASPAR, PP .

JOURNAL OF CHEMICAL PHYSICS, 1972, 57 (01) :389-&

[4] ELECTROSTATIC SELF-PLUGGING OF A PICKET FENCE CUSPED MAGNETIC-FIELD [J].

HERSHKOWITZ, N ;

SMITH, JR ;

KOZIMA, H .

PHYSICS OF FLUIDS, 1979, 22 (01) :122-125

[5]

LAMPE FW, COMMUNICATION

[6] MAGNETIC MULTIPOLE CONTAINMENT OF LARGE UNIFORM COLLISIONLESS QUIESCENT PLASMAS [J].

LIMPAECHER, R ;

MACKENZIE, KR .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (06) :726-731

[7] STRUCTURAL INTERPRETATION OF THE VIBRATIONAL-SPECTRA OF A-SI-H ALLOYS [J].

LUCOVSKY, G ;

NEMANICH, RJ ;

KNIGHTS, JC .

PHYSICAL REVIEW B, 1979, 19 (04) :2064-2073

[8] INFLUENCE OF INTERFACE CHARGES ON TRANSPORT MEASUREMENTS IN AMORPHOUS SILICON FILMS [J].

SOLOMON, I ;

DIETL, T ;

KAPLAN, D .

JOURNAL DE PHYSIQUE, 1978, 39 (11) :1241-1246

[9] DOPED AMORPHOUS-SEMICONDUCTORS [J].

SPEAR, WE .

ADVANCES IN PHYSICS, 1977, 26 (06) :811-845

[10] MASS-SPECTROMETRY OF A SILANE GLOW-DISCHARGE DURING PLASMA DEPOSITION OF A-SI-H FILMS [J].

TURBAN, G ;

CATHERINE, Y ;

GROLLEAU, B .

THIN SOLID FILMS, 1980, 67 (02) :309-320

← 1 2 →