MESOSCOPIC SELF-ASSEMBLY OF GOLD ISLANDS AN DIBLOCK-COPOLYMER FILMS

被引：135
作者：
MORKVED, TL
WILTZIUS, P
JAEGER, HM
GRIER, DG
WITTEN, TA
机构：
[1] UNIV CHICAGO,DEPT PHYS,CHICAGO,IL 60637
[2] AT&T BELL LABS,MURRAY HILL,NJ 07974
来源：
APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 04期
关键词：
D O I：
10.1063/1.111118
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We describe the fabrication and characterization of self-assembled gold island arrays on diblock-copolymer thin films. The natural tendency of these polymers to form ordered phases is used to induce selective aggregation of evaporated gold metal during an annealing process. We obtain well-defined, nanoscale island arrays aligned with one of the copolymer blocks. Near perfect segregation is achieved between the two domains. Two types of diblock-copolymer systems are discussed, together with the resulting island patterns.
引用
收藏
页码：422 / 424
页数：3
相关论文
共 26 条
[1]  
BANDRUP J., 1989, POLYM HDB
[2]  
BASSETT GA, 1967, J MACROMOL SCI B, V1, P161
[3]   BLOCK COPOLYMER THERMODYNAMICS - THEORY AND EXPERIMENT [J].
BATES, FS ;
FREDRICKSON, GH .
ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 1990, 41 (01) :525-557
[4]   ULTRA-HIGH-RESOLUTION NEGATIVE E-BEAM RESIST - ALF3 [J].
BORSJE, HR ;
JAEGER, HM ;
RADELAAR, S .
MICROELECTRONIC ENGINEERING, 1992, 17 (1-4) :311-314
[5]   SYNTHESIS OF SILVER AND GOLD NANOCLUSTERS WITHIN MICROPHASE-SEPARATED DIBLOCK COPOLYMERS [J].
CHAN, YNC ;
SCHROCK, RR ;
COHEN, RE .
CHEMISTRY OF MATERIALS, 1992, 4 (01) :24-27
[6]   SURFACE-INDUCED ORIENTATION OF SYMMETRIC, DIBLOCK COPOLYMERS - A SECONDARY ION MASS-SPECTROMETRY STUDY [J].
COULON, G ;
RUSSELL, TP ;
DELINE, VR ;
GREEN, PF .
MACROMOLECULES, 1989, 22 (06) :2581-2589
[7]   APPLICATIONS OF SURFACE TEXTURES PRODUCED WITH NATURAL LITHOGRAPHY [J].
DECKMAN, HW ;
DUNSMUIR, JH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04) :1109-1112
[8]   NATURAL LITHOGRAPHY [J].
DECKMAN, HW ;
DUNSMUIR, JH .
APPLIED PHYSICS LETTERS, 1982, 41 (04) :377-379
[9]   VERY SMALL (GREATER-THAN 20 NM) LITHOGRAPHIC WIRES, DOTS, RINGS, AND TUNNEL-JUNCTIONS [J].
DOLAN, GJ ;
DUNSMUIR, JH .
PHYSICA B, 1988, 152 (1-2) :7-13
[10]   NANOMETER MOLECULAR LITHOGRAPHY [J].
DOUGLAS, K ;
CLARK, NA ;
ROTHSCHILD, KJ .
APPLIED PHYSICS LETTERS, 1986, 48 (10) :676-678
123