INFRARED TRANSPARENT AND AMORPHOUS-CARBON GROWN UNDER ION IMPACT IN A BUTANE PLASMA

被引：65
|
作者：
HOLLAND, L
OJHA, SM
机构：
来源：
THIN SOLID FILMS | 1978年 / 48卷 / 03期
关键词：
D O I：
10.1016/0040-6090(78)90005-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：L21 / L23
页数：3
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