RAMAN DETERMINATION OF MOLECULAR-STRUCTURE AND PHYSICAL-PROPERTIES OF DIELECTRIC COATINGS

被引:29
作者
EXARHOS, GJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期
关键词
D O I
10.1116/1.573609
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
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页码:2962 / 2968
页数:7
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