SIMS AND MICROELECTRONICS

Because of its unique capabilities to provide trace sensitivity and excellent depth and lateral resolution, SMS is one of the most powerful characterization techniques for semiconductor materials and microelectronic devices. A succinct review on the basic principles of SIMS will be given, followed by a description of the current status on quantification. We will also discuss selected applications of SIMS in these areas, in addition to some recent important innovations which have dramatically expanded the scope of the SIMS technique.