MECHANISM OF POLYMER PHOTOABLATION EXPLORED WITH A QUARTZ CRYSTAL MICROBALANCE

被引：0
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作者：
LAZARE, S
GRANIER, V
机构：
来源：
POLYMERS IN MICROLITHOGRAPHY: MATERIALS AND PROCESSES | 1989年 / 412卷
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中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
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页码：411 / 423
页数：13
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