RECRYSTALLIZATION OF INSB THIN-FILMS OBTAINED BY CATHODE SPUTTERING

被引：3
|
作者：
JACHIMOWSKI, M [1 ]
KUSIOR, E [1 ]
机构：
[1] ACAD MINING & MET, INST MET, DEPT SOLID STATE PHYS, KRAKOW, POLAND
来源：
THIN SOLID FILMS | 1974年 / 24卷 / 01期
关键词：
D O I：
10.1016/0040-6090(74)90260-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：151 / 155
页数：5
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