共 50 条
- [11] EXCITED-STATES OF METHANE - REACTION CH4 = CH2 + H-2 ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1978, 176 (SEP): : 157 - 157
- [19] High rate CH4:H-2 plasma etch processes for InP JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (05): : 1728 - 1732