OXIDATION STACKING-FAULTS IN LARGE DIAMETER CZ-SILICON

被引：0

作者：

REA, SN ^{[1
]}

GRIMES, HM ^{[1
]}

机构：

[1] TEXAS INSTRUMENTS INC,SHERMAN,TX 75090

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C112 / C112

页数：1

共 50 条

[1] A PREFERENTIAL ETCH STUDY OF SWIRLS AND STACKING-FAULTS IN CZ SILICON
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