DESIGN AND PERFORMANCE OF AN INEXPENSIVE SUBSTRATE HEATER FOR OFF-AXIS THIN-FILM DEPOSITION

被引：8
作者：
APPLEYARD, NJ
JACKSON, TJ
WELCH, RG
PALENQUE, ER
PALMER, SB
机构：
[1] Department of Physics, University of Warwick
来源：
MEASUREMENT SCIENCE AND TECHNOLOGY | 1995年 / 6卷 / 03期
关键词：
D O I：
10.1088/0957-0233/6/3/016
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The design and performance of a substrate heater intended for use in depositing thin films by, for example, laser ablation deposition is presented. The heater, which is simple and inexpensive to make, employs radiative heating so that the substrate may be rotated during film deposition if desired. Examples of films grown using the described heater are given.
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页码：337 / 340
页数：4
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