HYDROGEN AND MATRIX EFFECT ON THE OPTICAL GAP OF SPUTTERED A-SI-H

被引:15
作者
DENEUVILLE, A [1 ]
BRUYERE, JC [1 ]
MINI, A [1 ]
KAHIL, H [1 ]
DANIELOU, R [1 ]
LIGEON, E [1 ]
机构
[1] CEN,DEPT RECH FONDAMENTALE,F-38041 GRENOBLE,FRANCE
关键词
D O I
10.1016/0022-3093(80)90639-0
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:469 / 473
页数:5
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