STRUCTURAL, OPTICAL, AND DIELECTRIC PROPERTIES OF REACTIVELY SPUTTERED FILMS IN SYSTEM AIN-BN

被引：28

作者：

NOREIKA, AJ

FRANCOMBE, MH

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 04期

关键词：

D O I：

10.1116/1.1315741

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：722 / +

页数：1

共 15 条

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[10] DIELECTRIC PROPERTIES OF REACTIVELY SPUTTERED FILMS OF ALUMINUM NITRIDE [J].

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (01) :194-+

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