SPUTTER GROWTH AND CHEMICAL-ANALYSIS BY X-RAY PHOTOELECTRON SPECTROSCOPY-ELECTRON SPECTROSCOPY OF AN INSE THIN-FILM

被引：21
作者：
MCEVOY, AJ
PARKES, A
SOLT, K
BICHSEL, R
机构：
[1] NEW UNIV ULSTER,DEPT PHYS,BELFAST,ANTRIM,NORTH IRELAND
[2] ECOLE POLYTECH FED LAUSANNE,PHYS APPL LAB,CH-1007 LAUSANNE,SWITZERLAND
来源：
THIN SOLID FILMS | 1980年 / 69卷 / 01期
关键词：
D O I：
10.1016/0040-6090(80)90211-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：L5 / L8
页数：4
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