THE ROLE OF CHLORINATED SURFACE-FILMS IN EXCIMER LASER ETCHING OF CU AT LOW CL2 PRESSURES

被引：10
作者：
BALLER, TS
VANVEEN, GNA
DIELEMAN, J
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期
关键词：
D O I：
10.1116/1.575715
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1409 / 1413
页数：5
相关论文
共 12 条
[1]  
BALLER TS, IN PRESS
[2]  
BAUERLE D, 1986, CHEM PROCESSING LASE
[3]   OPTICAL PROPERTIES OF SILVER AND CUPROUS HALIDES [J].
CARDONA, M .
PHYSICAL REVIEW, 1963, 129 (01) :69-+
[4]   PHOTODESORPTION AND ADSORBATE SURFACE INTERACTIONS STIMULATED BY LASER-RADIATION [J].
CHUANG, TJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (05) :1408-1420
[5]   DIRECT WRITING OF METAL CONDUCTORS WITH NEAR-UV LIGHT [J].
GILGEN, HH ;
CACOURIS, T ;
SHAW, PS ;
KRCHNAVEK, RR ;
OSGOOD, RM .
APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1987, 42 (02) :55-66
[6]   LASER-INDUCED DESORPTION AND ETCHING PROCESSES ON CHLORINATED CU AND SOLID CUCL SURFACES [J].
SESSELMANN, W ;
MARINERO, EE ;
CHUANG, TJ .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 41 (03) :209-221
[7]   THE INTERACTION OF CHLORINE WITH COPPER .1. ADSORPTION AND SURFACE-REACTION [J].
SESSELMANN, W ;
CHUANG, TJ .
SURFACE SCIENCE, 1986, 176 (1-2) :32-66
[8]   THE INTERACTION OF CHLORINE WITH COPPER .2. BULK DIFFUSION [J].
SESSELMANN, W ;
CHUANG, TJ .
SURFACE SCIENCE, 1986, 176 (1-2) :67-90
[9]   MAGNETO-REFLECTIVITY MEASUREMENTS ON EXCITON BANDS IN CUCL [J].
STAUDE, W .
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 1971, 43 (01) :367-+
[10]   A TIME-OF-FLIGHT STUDY OF THE NEUTRAL SPECIES PRODUCED BY NANOSECOND LASER ETCHING OF CUCL AT 308 NM [J].
VANVEEN, GNA ;
BALLER, T ;
DEVRIES, AE .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (10) :3746-3749
12