POLARIZATION CHARACTERISTICS OF SCATTERED RADIATION FROM A DIFFRACTION GRATING BY ELLIPSOMETRY WITH APPLICATION TO SURFACE-ROUGHNESS

被引：66
作者：
AZZAM, RMA
BASHARA, NM
机构：
来源：
PHYSICAL REVIEW B | 1972年 / 5卷 / 12期
关键词：
D O I：
10.1103/PhysRevB.5.4721
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：4721 / &
相关论文
共 35 条
[1]   ELLIPSOMETRIC MEASUREMENT OF POLARIZATION TRANSFER-FUNCTION OF AN OPTICAL SYSTEM [J].
AZZAM, RMA ;
BASHARA, NM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (03) :336-&
[2]   UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES [J].
AZZAM, RMA ;
BASHARA, NM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) :600-&
[3]   POLARIZATION TRANSFER-FUNCTION OF AN OPTICAL SYSTEM AS A BILINEAR TRANSFORMATION [J].
AZZAM, RMA ;
BASHARA, NM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1972, 62 (02) :222-&
[4]   SPECIMEN COHERENT SCATTERING AND COMPENSATOR DEFECTS IN ELLIPSOMETRY [J].
AZZAM, RMA ;
BASHARA, NM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (09) :1236-&
[5]   ELLIPSOMETRY WITH IMPERFECT COMPONENTS INCLUDING INCOHERENT EFFECTS [J].
AZZAM, RMA ;
BASHARA, NM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (10) :1380-&
[6]   CALIBRATION OF ELLIPSOMETER DIVIDED CIRCLES [J].
AZZAM, RMA ;
BASHARA, NM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (08) :1118-&
[7]   GENERAL TREATMENT OF EFFECT OF CELL WINDOWS IN ELLIPSOMETRY [J].
AZZAM, RMA ;
BASHARA, NM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (06) :773-&
[8]  
AZZAM RMA, 1971, OPT COMMUN, V4, P203
[9]  
Beckmann P., 1968, DEPOLARISATION ELECT, P76
[10]   REFLECTANCE-INCREASING COATINGS FOR THE VACUUM ULTRAVIOLET AND THEIR APPLICATIONS [J].
BERNING, PH ;
HAAS, G ;
MADDEN, RP .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1960, 50 (06) :586-597
1234