SURFACE NORMAL VELOCITY DISTRIBUTION OF SPUTTERED ZR-ATOMS FOR LIGHT-ION IRRADIATION

被引：49
作者：
BAY, HL
BERRES, W
HINTZ, E
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1982年 / 194卷 / 1-3期
关键词：
D O I：
10.1016/0029-554X(82)90580-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：555 / 559
页数：5
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