OPTICAL-PROPERTIES OF AMORPHOUS C/DIAMOND THIN-FILMS

被引：51

作者：

SILVA, SRP ^{[1
]}

AMARATUNGA, GAJ ^{[1
]}

CONSTANTINOU, CP ^{[1
]}

机构：

[1] UNIV CAMBRIDGE,CAVENDISH LAB,CAMBRIDGE CB3 0HE,ENGLAND

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 72卷 / 03期

关键词：

D O I：

10.1063/1.351792

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Amorphous C/diamond films have been prepared by rf plasma enhanced vapor deposition from a CH4/Ar gas mixture. Infrared and optical-ultraviolet absorption characteristics are reported and used to characterize the bonding and optical properties of these films. It has been found that the optical band gap is not related to the hydrogen content in the films and varies according to the dc self bias developed during deposition. The IR data show that the hydrogen in the a-C/diamond films is associated with triply bonded sp1 carbon as in acetelyne. The optical band gap of the films can be varied from 1.2-4.0 eV.

引用

页码：1149 / 1153

页数：5

共 23 条

[1] CRYSTALLINE DIAMOND GROWTH IN THIN-FILMS DEPOSITED FROM A CH4-AR RF PLASMA [J].

AMARATUNGA, G ;

PUTNIS, A ;

CLAY, K ;

MILNE, W .

APPLIED PHYSICS LETTERS, 1989, 55 (07) :634-635

[2] INFLUENCE OF DC BIAS VOLTAGE ON THE REFRACTIVE-INDEX AND STRESS OF CARBON-DIAMOND FILMS DEPOSITED FROM A CH4/AR RF PLASMA [J].

AMARATUNGA, GAJ ;

SILVA, SRP ;

MCKENZIE, DR .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (10) :5374-5379

[3]

AMARATUNGA GAJ, 1989, APR P DIAM TECHN UPD

[4] ELECTRONIC-PROPERTIES OF SEMICONDUCTING DIAMOND-LIKE CARBON DIAMOND [J].

CHAN, KK ;

SILVA, SRP ;

AMARATUNGA, GAJ .

THIN SOLID FILMS, 1992, 212 (1-2) :232-239

[5] HARD CARBON COATINGS WITH LOW OPTICAL-ABSORPTION [J].

DISCHLER, B ;

BUBENZER, A ;

KOIDL, P .

APPLIED PHYSICS LETTERS, 1983, 42 (08) :636-638

[6] GROWTH-MECHANISM OF VAPOR-DEPOSITED DIAMOND [J].

FRENKLACH, M ;

SPEAR, KE .

JOURNAL OF MATERIALS RESEARCH, 1988, 3 (01) :133-140

[7] HYDROGEN CONTENT IN A-SIC-H FILMS PREPARED BY PLASMA DECOMPOSITION OF SILANE AND METHANE OR ETHYLENE [J].

FUJIMOTO, F ;

OOTUKA, A ;

KOMAKI, K ;

IWATA, Y ;

YAMANE, I ;

YAMASHITA, H ;

HASHIMOTO, Y ;

TAWADA, Y ;

NISHIMURA, K ;

OKAMOTO, H ;

HAMAKAWA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1984, 23 (07) :810-814

[8]

HOLLAND L, 1976, THIN SOLID FILMS, V17, P38

[9] THE EFFECTS OF HYDROGENATION ON THE PROPERTIES OF ION-BEAM SPUTTER DEPOSITED AMORPHOUS-CARBON [J].

JANSEN, F ;

MACHONKIN, M ;

KAPLAN, S ;

HARK, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :605-609

[10] DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA [J].

KAMO, M ;

SATO, Y ;

MATSUMOTO, S ;

SETAKA, N .

JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) :642-644

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